Te whakaahua ultraviolet tino kaha (EUV): te hangarau e tautoko ana i te heke mai o ngā maramara

Ina kōrerohia te heke mai o ngā maramara, ngā waea pūkoro tino kaha, te heke mai rānei o te matauranga horihori, kotahi te kupu e puta ake ana i roto i te kōrero: te whakaahua ultraviolet tino kaha, e kiia ana ko te whakaahua EUVKua noho tēnei hangarau hei ārai, hei pūkaha hoki mō te whanaketanga o ngā taputapu haurua-ā-ira tino hou o te ao.

Ahakoa te ahua hangarau o te ariā, ko te mārama ki te tikanga o te EUV lithography, me pēhea te mahi, ko wai te kaiwhakahaere, me tōna pānga ki te ao tōrangapū me te ōhanga o te ao te mea nui ki te mārama he aha te korenga o ngā maramara, he aha ētahi whenua e whawhai ana mō ēnei mīhini, me te aha ngā kamupene pēnei i... ASML, TSMC, Samsung, Intel rānei Kua noho hei rautaki ā-ao whānui rātou.

He aha te whakaahua ultraviolet tino kino (EUV)?

I roto i te umanga semiconductor, e pā ana te EUV lithography ki tētahi tikanga whakaahua-ipurangi e whakamahi ana i te mārama ultraviolet tino kaha me te roanga ngaru o te 13,5 nanometer, arā, i roto i te rohe o ngā hihi-X ngohengohe i roto i te whānuitanga hikohiko. He poto ake tēnei roanga ngaru i te roanga ngaru o te mārama e kitea ana (400-700 nm) me te roanga ngaru ultraviolet hohonu (DUV), e mahi ana i te 248 nm (KrF) 193 nm rānei (ArF).

Mā te whakamahinga o tēnei roangaru poto rawa ka taea tautuhia ngā tauira iti ake, matotoru ake hoki i runga i ngā papa silicon, e whai hua ana ki te whakauru i ngā piriona transistors ki roto i tētahi maramara kotahi. Ka puta mai i ia whakatupuranga hou o ngā pūnga lithographic (7 nm, 5 nm, 3 nm, 2 nm, 1,8 nm…) he maramara tere ake, he kaha ake, ā, he he iti ake te whakamahinga pūngao.

Ko te whakaahua-ā-ringa, ahakoa mā te DUV, mā te EUV rānei, he mea hanga mai i whakaatahia he tauira āhuahanga ki runga i tētahi papa kua pania ki te ātete whakaahuaKa whakarerekētia tēnei photopolymer ina whakamāramahia mā roto i tētahi kōpare (photomask rānei), kia wairewa, kia kore rānei e wairewa ngā wāhi e kitea ana, ā, ka taea te whakairo i ngā hanganga moroiti ki runga i te papa. Ki te EUV, he rite tonu te kaupapa ā-tinana, engari ka tino piki haere te uauatanga hangarau o te pūnaha.

Ko tētahi meka matua koia tēnei Ko te roanga ngaru o te 13,5 nm he tekau ngā wā iti iho i tērā e whakamahia ana i roto i ngā matawai ArF (193 nm). Nā tēnei, ka taea e ngā taputapu EUV te tā i ngā taipitopito iti iho i te 20 nm, he mea ka taea anake te whakatutuki e te tuhi whakaahua tikanga mā te whakamahi i ngā tikanga maha-tauira tino uaua, puhoi, me te utu nui.

Te whakaputanga me te whakahaere i te mārama EUV

Ko te whakaputa i te mārama 13,5 nm i roto i te huarahi whakahaere me te mana e tika ana tētahi o ngā wero hangarau matua o tēnei hangarauI roto i ngā pūnaha o nāianei, he pūtake taiaho CO₂ mana-teitei Ka pupuhihia e ia ngā pātere e rua tino tere ki tētahi pata wai iti e neke haere ana. Ka whakapōturitia te āhua o te pata e te pātere tuatahi; ka mimitia e te pātere tuarua, he kaha ake, ka hanga he parāuma.

Ka tukuna e tēnei plasma tine wera te irahiko EUV, ka hopukina e te whakaata kohikohi ka tukuna ki te toenga o te pūnaha whatu. Ka tere tonu te tukurua o tēnei tukanga katoa, tata ki 50.000 wa ia hekonahei whakaputa i tētahi rere mārama e kaha ana hei pupuri i te tere whakaputa ahumahi.

I te mea ka mimitia te irahiko EUV e te hau, ko te ara e haere ana mai i te pūtake ki te papapa me noho i roto i te rūma korehau kounga teiteiHei tāpiri atu ki tēnā, ka taea e tētahi matūriki puehu, tētahi āhua rerekē rānei o ngā wāhanga whatu te whakakino i te ahua e whakaaturia ana, nō reira he tino nui ngā whakaritenga mō te horoi, te pumau ā-pūkaha, me te whakahaere wiri.

Ngā whatu whakaata, ngā whakaata kore e taea, me ngā kopare motuhake

He rerekē ki te DUV lithography, e whakamahi ana i ngā karāhe tuku me ngā kopare quartz mārama, ko te EUV lithography e hangai ana ki ngā karu whakaata katoaHe māmā noa te take: tata ki ngā rauemi katoa, tae atu ki te karāhe e whakamahia ana i roto i ngā karaihe arotahi tuku iho, ka mimiti i te mārama o te 13,5 nm.

Engari mō ngā karāhe arotahi, ka whakamahia e ngā pūnaha EUV tētahi pūnaha kei roto ko ngā whakaata maha-paparanga tino tika Ka ārahi, ka arotahi hoki ēnei whakaata i te hihi mai i te pūtake ki te papa whakarewa. He maha ngā paparanga o ngā rauemi rerekē kua whakatakotoria ki te tika o te ngota, e āhei ai rātou ki te whakaata i te hihi EUV me te tino whai huatanga i roto i ngā rohe o te ahupūngao.

Heoi, ahakoa ēnei otinga matatau, ka mimitihia e ia whakaata tetahi wāhanga nui o te mārama e whiwhihia ana e ia. E whakamahi ana ngā pūnaha o nāianei a ASML i te iti rawa e rua ngā whakaata whakapūmau me ngā whakaata whakaata e ono, ā, i te wā kotahi, Tata ki te 96% o te māramatanga e tukuna ana ka ngaro.Ko te tikanga me tino kanapa te pūtake EUV kia tae atu ai te kaha ki te papa i muri i ngā whakaata katoa.

He rerekē anō hoki ngā kopare: kaua hei pereti mārama me ngā wāhi pōuriuri, ka whakamahia e ngā EUV ngā kopare whakaataHe maha ngā paparanga o ēnei, me ngā tauira kua whakairohia hei whakakoi me hei paninga hei whakahaere i te whakaata. Mēnā he hapa kei roto i te kopare, i ngā whakaata rānei, ka puta tonu he hapa tā, ā, nō reira, he hapa ngā angiangi.

He aha te mea e tino motuhake ai ngā mīhini EUV a ASML?

Ko ngā mīhini whakaahua EUV i hangaia e te kamupene Tatimana ASML, koia nei, ētahi o ngā mīhini tino uaua kua hangaiaKa whakauruhia e tētahi waeine EUV o te whakatipuranga tuatahi neke atu i te 100.000 ngā wāhanga, tata ki te 3.000 ngā taura, 40.000 ngā pūtu, me te tata ki te rua kiromita o ngā waea hiko ā-roto. Ā, he tino pai te whakaritenga o ēnei katoa e te pūmanawa whakahaere tino matatau.

Nā te uaua o tēnei taumata ka nui rawa te taputapu: he rite te wāhi o ia mīhini ki tērā o he pahi tāone Ā, e hiahiatia ana he maha ngā waeine āwhina, ngā pūnaha whakamatao, ngā taputapu korehau, me ngā hikohiko tino tika. Hei tāpiri, kāore ēnei e tukuna katoatia ana; ka haria i roto i ngā rau pouaka, ā, ka huihuia, ka whakatikatikaina i te wāhi mahi i ngā wheketere a te kiritaki.

Ko te nuinga o te angitu o ASML kei roto i tana whatunga o ngā hoa hangarau. Tata ki 90% o ngā wāhanga o ēnei mīhini i ahu mai i ētahi atu kaihanga kua tohatohahia puta noa i te ao. I roto i ēnei, e rua ngā ingoa matua e tū mai ana: ko Cymer me ZEISS, he mea tino nui kia pai ai te mahi a te EUV lithography.

Te takoha a ZEISS: ngā tirohanga i ngā rohe o te ahupūngao

Ko tētahi atu hoa mahi matua ko ZEISS, te kamupene whatu tino tika o Tiamana. Mā ZEISS e hoahoa, e hanga hoki te Ngā wāhanga whatu whakaata o ngā taputapu EUV mai i te ASML, mai i ngā whakaata kohikohi tuatahi ki ngā whatu whakaata matatini e whakawhiti ana i te tauira ki te silicon.

Me mahi ēnei whakaata me te roanga ngaru o 13,5 nm e pupuri ana i te ōritetanga me te tika o te ngaru tino nui. Ko te papatahi o te mata, arā, ki te whakanuia he whakaata kia rite ki te rahi o tētahi whenua, ka iti iho ngā hapa i te teitei o te rau tarutaru. Mā te iti noa o te rerekētanga e kitea ka pakaru te tauira, ā, ka kore e taea te whakamahi i te anga.

Haunga ngā whakaata, kei te whai wāhi a ZEISS ki te whakawhanake ngā pūoko me ngā kaiwhakahaere e whakatika ana i te wā tūturu Ka kitea e te pūnaha ngā whakarerekētanga iti, ngā nekehanga, ngā wiri rānei ka puta i te wā e whakahaerehia ana. Ka whakaratohia hoki e ia he pūmanawa e aroturuki tonu ana i te whanonga o te pūnaha whatu, ā, ka whakarite kia noho tonu i roto i ngā ātete tino pakari.

EUV-Nui-NA: te whakatupuranga hou e pakaru ana i te arai 3nm

Whai muri i ētahi tau i te whakakotahi i te whakatupuranga tuatahi o ngā taputapu EUV, kua tangohia e ASML te taahiraa e whai ake nei me āna mīhini o te whakatuwheratanga tau teitei, e mōhiotia ana ko te High-NA EUVKo te tauira arumoni tino rongonui ko te Twinscan EXE:5200, e kiia ana i ēnei rā ko te taputapu tuhi whakaahua tino matatau o te ao.

Ko te kī ki ēnei pūnaha hou kei roto i te pikinga ake o te kōhao tau o te pūnaha whatu: ka neke mai i te NA = 0,33 i roto i ngā taputapu EUV o nāianei ki NA = 0,55 i te High-NAI te nuinga o te wā, ka taea te tā i ngā taipitopito pai ake i te roanga ngaru kotahi o te 13,5 nm, ka whakapai ake i te taumira o ngā tauira e whakawhitia ana ki te anga.

Nā tēnei whakapainga, ka huakina e ngā taputapu EUV High-NA te kuaha ki te hanga i ngā ara iahiko whakauru. kei tua atu i te paepae arumoni o te 3 nm, tuku ngā pona huri noa i te 2 nm tae atu ki te hangarau 18A (1,8 nm) e whakaaro ana a Intel ki te whakamahi. Hei tāpiri, kua arotauhia e ASML ngā pūnaha whakahaere mīhini me te wafer kia taea ai e te mīhini High-NA kotahi te tukatuka i te neke atu i te 200 wafer ia hāora, he mea nui tēnei hei pupuri i te utu whakataetae mō ia maramara.

E ai ki te whakatau tata, ko te utu mō tētahi mīhini High-NA kei te tata ki $ 300 miriona mo ia waeineE tata ana ki te rua te utu o te EUV o te whakatipuranga tuatahi, e $150 miriona te utu. Ahakoa rā, mō ngā kaihanga e hiahia ana kia noho matatau ki te ao hangarau, he mea nui tonu tēnei hei haumitanga.

He mana motuhake hangarau me te pānga nui ki te ao tōrangapū

I roto i te mākete whakairo EUV, kotahi te meka e kore e taea te whakakorekore: Ko ASML anake te kaihanga e kaha ana ki te whakaputa i ēnei mīhini i runga i te tauine ahumahi. Ko te tikanga o tēnei mana motuhake he tūranga mana kāore i kitea i mua i roto i te mekameka uara haurua-ira.

Ka whakawhirinaki ngā kamupene nunui pēnei i a TSMC, Samsung, me Intel ki ngā taputapu EUV a ASML hei whakaputa i ā rātou maramara matatau rawa atu. Tata ki te hauwhā o te moni whiwhi Ko ngā moni whiwhi a ASML i ahu tika mai i te hoko o ngā pūnaha EUV, kāore i te whakaurua ngā kirimana ratonga, ngā whakapai ake, ngā whakangungu me ngā mahi tiaki.

Kei tēnei mara hangarau anō hoki tētahi te taha tōrangapū māramaNā te taupatupatu i waenganui i te Hononga o Amerika me Haina kua waiho te EUV hei pokapū o te tautohetohe. Kua pēhia e Washington te Netherlands kia whakawhāitihia te kaweake o ana mīhini tino matatau ki Haina, me te whai kia whakawhāitihia te urunga atu o te whenua Āhia ki ngā pona hou. I taua wā, kei te tūhuratia e ngā kaihanga Hapanihi pērā i a Canon ngā huarahi kē atu pērā i te nanoimprint lithography (NIL), e taea ai te whakaputa pona 2nm, engari i tēnei wā, ko te EUV tonu te paerewa matua i te taha hangarau.

He aha te hiranga o te EUV lithography mō ngā maramara o ēnei rā

Ko te hiranga o te EUV lithography ka tino mārama mā te titiro ki ngā taputapu e whakamahia ana e tātou i ia rā. He maha o ngā waea atamai, mataaratanga atamai, papatohu kēmu ataata me ngā rorohiko hou ake nei, i roto i ā rātou hoahoa maramara Pērā i roto i ā rātou mahi hanga, ka whakamahia e rātou ngā CPU, ngā GPU, ngā SoC me ngā mahara i hangaia me ngā pona 7nm, 5nm, iti iho rānei, ā, he mea nui kē te EUV mō ētahi paparanga o te tukanga.

Hei tauira, i whakapuaki a Samsung i te whakamahinga o EUV hei hanga i ana Ngā maramara 7nm e kiia nei ko te 7LPPKa whai hua ēnei hangarau hei whakahohe i ngā whatunga 5G kaha-teitei, ngā tono matauranga horihori matatau, te Ipurangi o ngā Mea, me ngā pūnaha taraiwa motuhake. E ai ki te kamupene, mā te huri ki te EUV ka taea te whakaiti i te whakapaunga pūngao tae atu ki te 50%, te pikinga o te mahi ki te 20%, me te hekenga tata ki te 40% o te tapuwae ki te whakataurite ki ngā hangarau ArF maha-tauira o mua.

Ka whakawhirinaki hoki ngā kamupene pēnei i a Apple, Huawei, me ētahi atu kaihoahoa maramara nui ki a rātou. Ngā whare whakarewa e whakamahi ana i te EUV kia taea ai te tuku taputapu tere ake, whai hua ake hoki. Ehara i te mea ko te hiko taketake anake te mea nui: he mea nui te whakaiti i te whakapaunga hiko me te wera kia pai ake ai te mahi a ngā waea pūkoro, ngā pona, me ngā tūmau i roto i ngā rohe wera e tika ana.

Ngā painga matua o te EUV lithography versus DUV

Ko te painga nui tuatahi o te EUV lithography ko te āheinga o tāia ngā āhuatanga iti rawaMā te poto o te roanga ngaru me te āputa tau e tika ana, ka taea te hanga i ngā hanganga, mō te rahi o te maramara kotahi, ka whakareatia te maha o ngā transistors e wātea ana ki ngā wā maha atu i ngā hangarau o mua.

Ka whakamaoritia tēnei ki ngā maramara me te kaha tukatuka nui ake, te mahara whakauru nui ake Ā, i runga ake i ngā mea katoa, he iti ake te whakamahinga pūngao mō ia mahi. Mō ngā pokapū raraunga, ngā whatunga whakawhitiwhiti kōrero, ngā tono AI nui rānei, he pānga nui tēnei whakapainga i te whai huatanga o te pūngao ki ngā utu whakahaere.

Ko te painga tuarua e pā ana ki te tukanga: ka taea e te EUV whakaitihia te maha o ngā taahiraa tuhi e hiahiatia ana kia tutuki ai te tauira kotahi. Ahakoa e toru, e whā rānei ngā whakaaturanga rerekē e hiahiatia ana mō ngā tikanga ArF me ngā tikanga maha-tauira hei whakatutuki i tētahi hanganga uaua, he maha ngā wā kotahi anake e hiahiatia ana e te EUV. Mā tēnei ka māmā ake te rere o te hanga, ka pai ake te hua, ā, ka taea te whakaiti i te utu mō ia maramara i roto i te wā waenga.

Hei tāpiri atu, mā te kaha ki te arotahi i ngā mahi ki tētahi mata iti ake, ka huaki te kuaha ki ngā hoahoa pūnaha-i-runga-i-te-maramara kua whakauruhia, me ngā poraka o te PTM, te GPU, ngā whakaterenga AI, te mahara, me te arorau motuhake e noho tahi ana i runga i te wahi silicon kotahi—he mea ka taea anake ina tino tiketike te matotoru o te whakaurunga.

Ngā ngoikoretanga me ngā herenga o nāianei o te EUV

Ko te arai matua ki te hanga tuhinga EUV, kāore e kore, ko te te utu nui rawa atu o ngā mīhini me te hanganga e hiahiatia ana e rātou. Ehara i te mea ko ngā taputapu e neke atu ana i te kotahi rau miriona tāra ia waeine anake tā mātou e kōrero nei, engari ko ngā tipu katoa hoki kua hangaia hei karapoti i a rātou, me ngā rūma ma matatau, ngā puna hiko tino kaha, me ngā pūnaha tautoko tino uaua.

Ko te tikanga o tēnei, he iti noa iho ngā whare hanga me ngā IDM o te taumata teitei—TSMC, Samsung, Intel, me ētahi atu—ka taea te whakamahi i te EUV i runga i te tauine nui. Ko te nuinga o te toenga o te umanga kei te whakamahi tonu i te DUV lithography, he mea utu nui ake, ā, he tino tika mō tōna kaupapa i whakaritea. ngā maramara iti ake te matatau pērā i te hunga e mahi ana i roto i ngā motuka, ngā hikohiko kaihoko taketake, me te maha o ngā pūnaha ahumahi.

Hei tāpiri, kei te whakaroa tonu te hangarau wero hangarau Ko ētahi o ngā āhuatanga nui ko: te kaha o ngā pūtake mārama, te roa o te ora o ngā paninga whatu ki te ārai i ngā hihi kaha-nui, te uaua o ngā kopare whakaata, me te hiahia kia mau tonu te hua o te mahi me te kore e puta he hapa mō ia angaanga—ngā take e whakatikatikaina tonutia ana i ia whakatipuranga, i ia whakatipuranga.

ASML, Intel, Samsung me TSMC: he mekameka o ngā whakawhirinakitanga whakawhiti

Ehara i te mea he hononga kiritaki-kaituku noa iho te mahi tahi a ASML me ngā kaihanga maramara nui. Hei tauira, i haumi a Intel ki te $4.000 piriona i roto i te ASML i te tau 2012 hei tautoko i te whanaketanga o ngā mīhini EUV tuatahi, hei whakarite kia matua uru atu ki te hangarau, me te whai wāhi kaha ki tōna whanaketanga.

Kei te tuku a ASML i āna pūnaha EUV High-NA tuatahi ki ngā kiritaki rautaki. Kua tukuna te pūnaha Twinscan EXE:5200 tuatahi ki tētahi wheketere Intel i Hillsboro, California, he nekehanga e hangai ana ki te mahere a te kamupene kia tae atu ki tana pona 18A (1,8 nm) i te haurua tuarua o te tekau tau. kati te āputa ki a TSMC me Samsung i roto i te whakataetae mō te kaiārahi hangarau.

I tēnei wā, kei te whakataetae a Samsung me TSMC mō te kaha whakaputa EUV e wātea ana me te kaupapa matua i roto i ngā tuku ASML. Ko ngā whakaroa kaweake—i whakanuia ake e te mate urutā COVID-19—kua akiaki i ētahi wā whakatikatika anō i ngā mahere ara, whakaroa i te hanga whakamātautau o ngā pona pēnei i te 3nm me te whakarite anō i te tohatoha o ngā wafers i waenga i ngā kiritaki uara nui pēnei i a Apple, Qualcomm me ngā kaihanga waka nui.

Ko te tikanga o tēnei pūnaha katoa, ko te wātea o ngā pūnaha EUV, te tere tuku o te ASML, me te urutau o Cymer, ZEISS, me ētahi atu kaiwhakarato kua noho hei mea nui hei whakatau Ko ēhea ngā kamupene me ēhea ngā whenua e whakatakoto ana i te tere? i roto i te umanga semiconductor o te whakatupuranga e whai ake nei.

Kua whakatūria te whakaahua ultraviolet tino kaha hei huarahi ki te pupuri i te Ture a Moore kia ora tonu, mā te hanga maramara 7, 5, me te 3 nm, me te anga atu ki te 2 nm me raro iho, engari he rauemi onge, he tino utu nui hoki e whakahaerehia ana e te hunga ruarua. Mā te mārama ki tōna ahupūngao, ōna wero, me tōna mākete ka āwhina i a tātou ki te kite he aha tā tātou waea pūkoro, tā tātou motuka, te kapua rānei e whakamahia ana e tātou i ia rā e whakawhirinaki ana ki ētahi mīhini nunui kua marara puta noa i te ao me te ao. Te kaha o ASML me ōna hoa mahi ki te pana tonu i ngā rohe o te hangarau EUV.

Tuhinga e pa ana:

Kei te whakarite a Apple me Intel i tetahi hononga hou hei hanga i nga maramara M-raupapa e whai ake nei.

Alberto navarro

He kaingākau ahau ki te hangarau kua huri i ana hiahia "geek" hei umanga. Neke atu i te 10 tau o toku oranga kua pau i ahau ki te whakamahi i nga hangarau hou me te tarai i nga momo kaupapa katoa na runga i te tino hiahia. Inaianei kua tohunga ahau ki te hangarau rorohiko me nga keemu ataata. Ko tenei na te mea kua neke atu i te 5 tau ahau e tuhi ana mo nga momo paetukutuku mo te hangarau me nga keemu ataata, ka hanga tuhinga e whai ana ki te tuku korero ki a koe i roto i te reo e marama ana ki te katoa.

Mena kei a koe etahi patai, ko taku mohiotanga mai i nga mea katoa e pa ana ki te punaha whakahaere Windows me te Android mo nga waea pūkoro. A ko taku pono ki a koe, kei te pirangi au ki te whakapau i etahi meneti hei awhina i a koe ki te whakatau i nga patai kei a koe i tenei ao ipurangi.