Chithunzi cha Extreme ultraviolet (EUV) photolithography: ukadaulo womwe umathandizira tsogolo la tchipisi

Pokambirana za tsogolo la tchipisi, mafoni amphamvu kwambiri, kapena luntha lochita kupanga lomwe likubwera, pali mawu amodzi omwe nthawi zonse amabuka muzokambirana: chithunzi cha ultraviolet chochuluka kwambiri, chomwe chimatchedwanso kuti EUV lithographyUkadaulo uwu wakhala vuto lalikulu komanso mphamvu yoyendetsera patsogolo makina apamwamba kwambiri padziko lonse lapansi a semiconductors.

Ngakhale lingaliroli likumveka laukadaulo kwambiri, kumvetsetsa tanthauzo la EUV lithography, momwe imagwirira ntchito, amene amailamulira, komanso momwe imakhudzira ndale za dziko ndi chuma cha padziko lonse lapansi ndikofunikira kwambiri kuti timvetsetse chifukwa chake pali kusowa kwa ma chip, chifukwa chake mayiko ena akukangana pa makina awa, komanso chifukwa chake makampani amakonda ASML, TSMC, Samsung kapena Intel Akhala anzeru padziko lonse lapansi.

Kodi chithunzi cha kuwala kwa dzuwa (EUV) chojambulidwa ndi dzuwa kwambiri n'chiyani?

Mu makampani opanga ma semiconductor, EUV lithography imatanthauza njira yojambulira zithunzi pogwiritsa ntchito kuwala kwa ultraviolet kwambiri ndi kutalika kwa mafunde kwa ma nanometer 13,5, ndiko kuti, m'dera la ma X-ray ofewa mkati mwa electromagnetic spectrum. Kutalika kwa mafunde kumeneku ndi kochepa kwambiri kuposa kuwala kooneka (400-700 nm) komanso kuposa kwa deep ultraviolet (DUV) lithography, komwe nthawi zambiri kumagwira ntchito pa 248 nm (KrF) kapena 193 nm (ArF).

Kugwiritsa ntchito kwa wavelength yayifupi kwambiri kumeneku kumalola fotokozani mapangidwe ang'onoang'ono kwambiri komanso okhuthala pa ma silicon wafers, zomwe zikutanthauza kuthekera kophatikiza ma transistors mabiliyoni ambiri pa chip imodzi. Mbadwo uliwonse watsopano wa lithographic nodes (7 nm, 5 nm, 3 nm, 2 nm, 1,8 nm…) umabwera ndi ma chips othamanga kwambiri, okhala ndi mphamvu zambiri komanso kugwiritsa ntchito mphamvu mochepa kwambiri.

Photolithography, kaya ndi DUV kapena EUV, makamaka imakhala ndi onetsani mawonekedwe a geometric pa wafer yokutidwa ndi photoresistPhotopolymer iyi imasinthidwa ikawunikiridwa mwachisawawa kudzera mu chigoba (kapena chigoba cha photo), kotero kuti malo owonekerawo amasungunuka kapena osasungunuka, zomwe zimapangitsa kuti mapangidwe ang'onoang'ono azitha kujambulidwa pa substrate. Ndi EUV, mfundo yachilengedwe ndi yofanana, koma zovuta zaukadaulo za dongosololi zimawonjezeka kwambiri.

Mfundo yofunika kwambiri ndi yakuti Kutalika kwa mafunde kwa 13,5 nm ndi kochepa kuposa kuwirikiza kakhumi kuposa zomwe zimagwiritsidwa ntchito mu ma scanner a ArF (193 nm). Chifukwa cha izi, zida za EUV zimatha kusindikiza tsatanetsatane wochepera 20 nm, chinthu chomwe lithography yachikhalidwe ingathe kuchita pokhapokha pogwiritsa ntchito njira zovuta kwambiri, zochedwa, komanso zodula kwambiri zokhala ndi mapangidwe ambiri.

Momwe kuwala kwa EUV kumapangidwira ndi kusamalidwa

Kupanga kuwala kwa 13,5 nm mwanjira yowongoleredwa komanso ndi mphamvu yofunikira ndi chimodzi mwa mavuto akuluakulu aukadaulo waukadaulo uwuMu machitidwe amakono, a gwero la laser la CO₂ lamphamvu kwambiri Imayatsa ma pulse awiri othamanga kwambiri pa kadontho kakang'ono ka madzi koyenda. Kugunda koyamba kumawononga kadonthoko; kugunda kwachiwiri, kolimba kwambiri, kumakapanga plasma.

Plasma yotentha iyi imatulutsa kuwala kwa EUV, komwe kumagwidwa ndi galasi losonkhanitsa ndikutumizidwa ku makina ena onse owunikira. Njira yonseyi imabwerezabwereza mofulumira kwambiri, pafupifupi Nthawi 50.000 pa sekondikuti ipange kuwala koyenda bwino mokwanira kuti ipitirire kupanga zinthu m'mafakitale.

Popeza kuti kuwala kwa EUV kumayamwa ndi mpweya, njira yomwe imayenda kuchokera ku gwero kupita ku wafer iyenera kukhala mkati mwa chipinda chapamwamba kwambiri chotsukira mpweyaKuphatikiza apo, fumbi lililonse kapena kusakhazikika kulikonse muzinthu zowunikira kumatha kuwononga chithunzi chomwe chawonetsedwa, kotero zofunikira paukhondo, kukhazikika kwa makina, ndi kuwongolera kugwedezeka ndizokwera kwambiri.

Magalasi owunikira, magalasi osatheka, ndi zigoba zapadera

Mosiyana ndi DUV lithography, yomwe imagwiritsa ntchito magalasi otumizira ndi masks owonekera a quartz, EUV lithography imachokera pa kuwala kowala bwinoChifukwa chake n'chosavuta: pafupifupi zipangizo zonse, kuphatikizapo galasi lomwe limagwiritsidwa ntchito mu magalasi achikhalidwe, limatenga kuwala kwa 13,5 nm.

M'malo mwa magalasi, machitidwe a EUV amagwiritsa ntchito makina opangidwa ndi magalasi olondola kwambiri okhala ndi zigawo zambiri Magalasi awa amatsogolera ndi kuyang'ana kuwala kuchokera ku gwero kupita ku wafer. Amapangidwa ndi zigawo zambiri zosinthika za zinthu zosiyanasiyana zomwe zimasungidwa molondola kwambiri, zomwe zimawalola kuwonetsa kuwala kwa EUV ndi mphamvu yapamwamba kwambiri mkati mwa malire a fizikisi.

Komabe, ngakhale ndi njira zamakonozi, galasi lililonse limatenga gawo lalikulu la kuwala komwe limalandira. Makina a ASML omwe alipo pano amagwiritsa ntchito magalasi osachepera awiri ozungulira ndi magalasi asanu ndi limodzi owonetsera kuwala, ndipo pamodzi, Pafupifupi 96% ya kuwala komwe kumatulutsidwa kumatayika.Izi zimafuna kuti gwero la EUV likhale lowala kwambiri kuti, pambuyo pa kuwunikira konse, mphamvu zokwanira zifike pa wafer.

Zophimba nkhope nazonso ndi zosiyana: m'malo mokhala mbale zowonekera bwino zokhala ndi malo osawonekera bwino, ma EUV amagwiritsa ntchito zophimba nkhope zowalaIzi zilinso ndi zigawo zambiri, zokhala ndi mapangidwe olembedwa ngati zokongoletsa ndi zokutira zomwe zimasinthasintha kuwala. Chilema chilichonse mu chigoba kapena magalasi nthawi yomweyo chimabweretsa zolakwika zosindikizira, motero, ma wafers olakwika.

N’chiyani chimapangitsa makina a ASML a EUV kukhala apadera kwambiri?

Makina a EUV photolithography opangidwa ndi kampani ya ku Netherlands ASML, kwenikweni, ndi ena mwa makina ovuta kwambiri omwe adapangidwapoChida chimodzi cha m'badwo woyamba cha EUV chimaphatikiza zida zoposa 100.000, zingwe pafupifupi 3.000, mabaluti 40.000, ndi mawaya amagetsi amkati pafupifupi makilomita awiri. Ndipo zonsezi zimagwirizanitsidwa bwino ndi mapulogalamu owongolera apamwamba kwambiri.

Kuvuta kumeneku kumapangitsa kuti zipangizozi zikhale zazikulu kwambiri: makina aliwonse amakhala ndi malo ofanana ndi a basi ya mzinda Ndipo zimafuna ma module angapo othandizira, makina oziziritsira, zida zoyeretsera mpweya, ndi zamagetsi olondola. Kuphatikiza apo, sizimatumizidwa mokwanira; zimanyamulidwa m'mabokosi ambiri ndikusonkhanitsidwa ndikuwongoleredwa pamalopo ku mafakitale a kasitomala.

Kupambana kwakukulu kwa ASML kuli m'gulu la ogwirizana nawo paukadaulo. 90% ya zida za makina awa zimachokera kwa opanga ena akugawidwa padziko lonse lapansi. Pakati pawo, mayina awiri ofunikira amaonekera: Cymer ndi ZEISS, onse awiri ofunikira kwambiri kuti EUV lithography igwire ntchito momwe iyenera kukhalira.

Zopereka za ZEISS: kuwala kwa maso kuli m'malire a fizikisi

Mnzake wina wofunika kwambiri ndi ZEISS, kampani yakale ya ku Germany yowunikira zinthu zolondola kwambiri. ZEISS imapanga ndikupanga Zida za EUV zowunikira zowunikira kuchokera ku ASML, kuyambira pa magalasi oyambira kusonkhanitsa mpaka ku ma optics ovuta omwe amasamutsa mawonekedwewo kukhala silicon.

Magalasi awa ayenera kugwira ntchito ndi mafunde a 13,5 nm kusunga kufanana ndi kulondola ya mawonekedwe a mafunde oopsa. Kusalala kwa pamwamba ndi kotere kuti, ngati galasi litakulitsidwa kufika kukula kwa dziko, zolakwikazo sizingakhale zazitali kuposa kutalika kwa tsamba la udzu. Kupotoka kulikonse komwe sikuoneka bwino kungawononge kapangidwe kake ndikupangitsa wafer kukhala yosagwiritsidwa ntchito.

Kuwonjezera pa magalasi, ZEISS ikugwira ntchito yopanga masensa ndi ma actuator omwe amakonza nthawi yeniyeni Dongosololi limazindikira kusintha pang'ono kwa masinthidwe, kusuntha, kapena kugwedezeka komwe kungachitike panthawi yogwira ntchito. Limaperekanso mapulogalamu omwe amawunika nthawi zonse momwe makina owonera amagwirira ntchito ndikuwonetsetsa kuti amakhalabe mkati mwa zolekerera zochepa kwambiri.

High-NA EUV: m'badwo watsopano womwe umaswa chotchinga cha 3nm

Pambuyo pa zaka zingapo kuphatikiza m'badwo woyamba wa zida za EUV, ASML yatenga gawo lotsatira ndi makina ake a kutseguka kwa manambala ambiri, komwe kumadziwika kuti High-NA EUVChitsanzo chamalonda chodziwika bwino kwambiri ndi Twinscan EXE:5200, chomwe masiku ano chimaonedwa kuti ndi chipangizo chapamwamba kwambiri cha lithography padziko lonse lapansi.

Chinsinsi cha machitidwe atsopanowa chili pakuwonjezeka kwa kutseguka kwa manambala kwa makina owonera: kumachokera ku NA = 0,33 mu zida za EUV zomwe zilipo pano kupita ku NA = 0,55 mu High-NAMwachidule, izi zimathandiza kusindikiza tsatanetsatane wocheperako pamlingo womwewo wa 13,5 nm, zomwe zimapangitsa kuti mapangidwe omwe atumizidwa ku wafer azitha kuoneka bwino.

Chifukwa cha kusinthaku, zida za High-NA EUV zimatsegula chitseko chopangira mabwalo ophatikizika kupitirira malire amalonda a 3 nm, kulola ma node ozungulira 2 nm komanso ukadaulo wa 18A (1,8 nm) womwe Intel ikukonzekera kugwiritsa ntchito. Kuphatikiza apo, ASML yakonza makina ogwiritsira ntchito makina ndi ma wafer kuti makina amodzi a High-NA athe kukonza ma wafer opitilira 200 pa ola limodzi, zomwe ndizofunikira kwambiri kuti pakhale mtengo wopikisana pa chip iliyonse.

Mtengo wa makina a High-NA akuti ndi pafupifupi $300 miliyoni pa unit iliyonseMtengo umenewo ndi wowirikiza kawiri mtengo wa EUV ya m'badwo woyamba, yomwe imadula pafupifupi 150 miliyoni. Ngakhale zili choncho, kwa opanga omwe akufuna kukhala patsogolo, ndi ndalama zofunika kwambiri.

Ukadaulo wokhawokha womwe uli ndi mphamvu yaikulu pandale za dziko

Mu msika wa EUV lithography, pali mfundo imodzi yosatsutsika: ASML ndiye kampani yokhayo yomwe ingathe kupanga makina awa pamlingo wa mafakitale. Kudziyimira pawokha kumeneku kumatanthauza udindo wapamwamba kwambiri wa mphamvu mkati mwa unyolo wamtengo wapatali wa semiconductor.

Zimphona monga TSMC, Samsung, ndi Intel zimadalira zida za ASML za EUV kuti zipange ma chip awo apamwamba kwambiri. kotala la ndalama zomwe amapeza Ndalama zomwe ASML imapeza zimachokera kale mwachindunji ku kugulitsa machitidwe a EUV, osaphatikizapo mapangano a ntchito, kukweza, kuphunzitsa ndi kukonza.

Gawo laukadaulo ili lilinso ndi gawo lomveka bwino la ndale za dzikoMikangano pakati pa United States ndi China yaika EUV lithography pakati pa mkanganowu. Washington yakakamiza dziko la Netherlands kuti lichepetse kutumiza makina ake apamwamba kwambiri ku China, cholinga chake ndi kuchepetsa mwayi wopeza ma node apamwamba mdzikolo la Asia. Pakadali pano, opanga aku Japan monga Canon akufufuza njira zina monga nanoimprint lithography (NIL), yomwe ingathe kupanga ma node a 2nm, koma pakadali pano, EUV ikadali muyezo womwe uli patsogolo paukadaulo.

Chifukwa chake EUV lithography ndi yofunika kwambiri pa ma chips amakono

Kufunika kwa EUV lithography kumamveka bwino poyang'ana zida zomwe timagwiritsa ntchito tsiku ndi tsiku. Zambiri mwa izi mafoni a m'manja, mawaya anzeru, zotonthoza zamasewera apakanema ndi makompyuta posachedwapa, zonse ziwiri kapangidwe ka tchipisi Monga momwe amachitira popanga zinthu, amagwiritsa ntchito ma CPU, ma GPU, ma SoC ndi ma memori opangidwa ndi ma node a 7nm, 5nm kapena otsika, pomwe EUV ndi yofunika kale pazigawo zina za njirayi.

Mwachitsanzo, Samsung yalengeza kuti ikugwiritsa ntchito EUV popanga Ma chips a 7nm otchedwa 7LPPUkadaulo uwu udzakhala wofunikira kwambiri pothandiza maukonde a 5G amphamvu kwambiri, mapulogalamu apamwamba anzeru zopanga zinthu, intaneti ya zinthu, ndi makina oyendetsa okha. Malinga ndi kampaniyo, kusinthaku kupita ku EUV kumalola kuchepetsa kugwiritsa ntchito mphamvu ndi 50%, kuwonjezeka kwa magwiridwe antchito ndi 20%, komanso kuchepa kwa pafupifupi 40% poyerekeza ndi ukadaulo wakale wa ArF wokhala ndi mitundu yambiri.

Makampani monga Apple, Huawei, ndi ena opanga ma chips akuluakulu nawonso amadalira iwo. Makampani opanga zinthu zakale omwe amagwiritsa ntchito EUV kuti athe kupereka zipangizo mwachangu komanso zogwira mtima. Ndipo sikuti ndi mphamvu yokha: kuchepetsa kugwiritsa ntchito mphamvu ndi kutentha ndikofunikira kwambiri kuti mafoni am'manja, ma laputopu, ndi ma seva azigwira ntchito bwino mkati mwa malire oyenera a kutentha.

Ubwino waukulu wa EUV lithography poyerekeza ndi DUV

Ubwino woyamba waukulu wa EUV lithography ndi kuthekera kwa sindikizani zinthu zazing'ono kwambiriNdi kutalika kwa nthawi yayitali komanso malo oyenera otseguka, nyumba zitha kupangidwa zomwe, pa kukula komweko kwa chip, zimachulukitsa chiwerengero cha ma transistors omwe alipo kangapo poyerekeza ndi ukadaulo wakale.

Izi zimamasulira kukhala tchipisi ndi mphamvu yayikulu yogwiritsira ntchito, kukumbukira kophatikizana kwambiri Ndipo, koposa zonse, kugwiritsa ntchito mphamvu kumachepetsa kwambiri pa ntchito iliyonse. Pa malo osungira deta, maukonde olumikizirana, kapena mapulogalamu akuluakulu a AI, kusintha kumeneku pakugwiritsira ntchito mphamvu moyenera kumakhudza kwambiri ndalama zogwirira ntchito.

Ubwino wachiwiri ndi wokhudzana ndi njira: EUV imalola kuchepetsa chiwerengero cha masitepe ofunikira a lithographic kuti akwaniritse njira yomweyo. Ngakhale kuti njira za ArF ndi njira zamitundu yambiri zingafunike njira zitatu kapena zinayi zosiyana kuti apange kapangidwe kovuta, nthawi zambiri EUV imangofuna imodzi yokha. Izi zimapangitsa kuti ntchito yopanga zinthu ikhale yosavuta, zimapangitsa kuti phindu likhale labwino, komanso zimachepetsa mtengo wa chip iliyonse pakapita nthawi.

Kuphatikiza apo, pokhala ndi mphamvu yogwiritsira ntchito kwambiri pamalo ang'onoang'ono, imatsegula chitseko cha zomangamanga za system-on-a-chip zomwe zimagwirizana kwambiri, zokhala ndi ma block a CPU, GPU, AI accelerators, memory, ndi logic yeniyeni zomwe zimagwirizana pa silicon imodzi - chinthu chomwe chimagwira ntchito pokhapokha ngati kuchulukana kwakukulu kwambiri.

Zovuta ndi zofooka za EUV zomwe zilipo panopa

Cholepheretsa chachikulu pa EUV lithography, mosakayikira, ndi mtengo wapamwamba kwambiri wa makina ndi zomangamanga zomwe amafunikira. Sitikulankhula za zida zomwe zimaposa madola zana miliyoni pa unit iliyonse, komanso mafakitale onse opangidwa mozungulira iwo, okhala ndi zipinda zoyera zapamwamba, magetsi amphamvu kwambiri, ndi makina othandizira ovuta kwambiri.

Izi zikutanthauza kuti makampani ochepa okha omwe amapanga maziko ndi ma IDM apamwamba—TSMC, Samsung, Intel, ndi ena ochepa—ndi omwe angakwanitse kugwiritsa ntchito EUV pamlingo waukulu. Makampani ambiri otsala akupitilizabe kugwiritsa ntchito DUV lithography, yomwe ndi yotsika mtengo komanso yokwanira bwino pa cholinga chake. tchipisi tosakhwima kwambiri monga omwe amagwiritsidwa ntchito m'magalimoto, zamagetsi wamba, ndi machitidwe ambiri amafakitale.

Kuphatikiza apo, ukadaulo ukupitirirabe kusokonekera zovuta zaukadaulo Zinthu zofunika kwambiri ndi izi: mphamvu ya magwero a kuwala, nthawi yokhalitsa ya zophimba zowala motsutsana ndi kuwala kwamphamvu kwambiri, zovuta za zophimba zowunikira, komanso kufunika kokhala ndi ntchito zambiri popanda kuyambitsa zolakwika pa wafer iliyonse - nkhani zomwe zikupitilira kukonzedwa mibadwomibadwo.

ASML, Intel, Samsung ndi TSMC: unyolo wodalirana

Mgwirizano pakati pa ASML ndi opanga ma chip akuluakulu si ubale wokha pakati pa kasitomala ndi wogulitsa. Mwachitsanzo, Intel idayika ndalama zambiri pa $4.000 biliyoni mu ASML mu 2012 kuthandizira chitukuko cha makina oyamba a EUV, kuonetsetsa kuti ukadaulowu ukupezeka patsogolo, komanso kutenga nawo mbali pakukula kwake.

Pakadali pano ASML ikupereka makina ake oyamba a High-NA EUV kwa makasitomala anzeru. Makina oyamba a Twinscan EXE:5200 aperekedwa ku fakitale ya Intel ku Hillsboro, California, zomwe zikugwirizana ndi njira ya kampaniyo yofikira node yake ya 18A (1,8 nm) mu theka lachiwiri la zaka khumi. Tsekani kusiyana ndi TSMC ndi Samsung mu mpikisano wa utsogoleri waukadaulo.

Pakadali pano, Samsung ndi TSMC akupikisana kuti apange EUV komanso kuti apereke patsogolo kutumiza kwa ASML. Kuchedwa kutumiza kunja—komwe kwakulitsidwa ndi mliri wa COVID-19—nthawi zina kwapangitsa kuti zinthu zisinthe. sinthani mapu a misewu, kuyimitsa kupanga ma node oyeserera monga 3nm ndikukonzanso kugawa ma wafer pakati pa makasitomala apamwamba monga Apple, Qualcomm kapena opanga magalimoto akuluakulu.

Dongosolo lonseli likutanthauza kuti kupezeka kwa machitidwe a EUV, kuchuluka kwa ASML komwe kumaperekedwa, komanso kusinthasintha kwa Cymer, ZEISS, ndi ogulitsa ena kwakhala zinthu zofunika kwambiri pakutsimikiza. Ndi makampani ati ndi mayiko ati omwe akutsogolera izi? mu makampani opanga ma semiconductor a m'badwo wotsatira.

Kujambula zithunzi za ultraviolet kwambiri kwadzikhazikitsa ngati njira yosungira Moore's Law kukhala ndi moyo, kupanga ma chips a 7, 5, ndi 3 nm, ndikugwiritsa ntchito ma 2 nm ndi pansi, komanso ngati chinthu chosowa komanso chodula kwambiri chomwe chimayendetsedwa ndi osewera ochepa. Kumvetsetsa sayansi yake, zovuta zake, ndi msika wake kumatithandiza kuona chifukwa chake foni yathu yam'manja, galimoto yathu, kapena mtambo womwe timagwiritsa ntchito tsiku ndi tsiku umadalira makina akuluakulu angapo padziko lonse lapansi komanso pa Mphamvu ya ASML ndi anzawo yopitiliza kukankhira malire a ukadaulo wa EUV.

Nkhani yowonjezera:

Apple ndi Intel akukonzekera mgwirizano watsopano kuti apange tchipisi ta M-series.

Alberto navarro

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